Tungsten Nitride Deposition by Thermal Chemical Vapor Deposition as Barrier Metal for Cu Interconnection
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چکیده
منابع مشابه
Tetragonal tungsten oxide nanobelts synthesized by chemical vapor deposition
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ژورنال
عنوان ژورنال: MATERIALS TRANSACTIONS
سال: 2002
ISSN: 1345-9678,1347-5320
DOI: 10.2320/matertrans.43.1585